詳細(xì)介紹
適用范圍Widely used:
硅晶塊、晶片電阻率及擴(kuò)散層、外延層、ITO導(dǎo)電箔膜、導(dǎo)電橡膠等材料方塊電阻 半導(dǎo)體材料/晶圓、太陽能電池、電子元器件,導(dǎo)電薄膜(ITO導(dǎo)電膜玻璃等),金屬膜,導(dǎo)電漆膜,蒸發(fā)鋁膜,PCB銅箔膜,
EMI涂層等物質(zhì)的薄層電阻與電阻率 導(dǎo)電性油漆,導(dǎo)電性糊狀物,導(dǎo)電性塑料,導(dǎo)電性橡膠,導(dǎo)電性薄膜,金屬薄膜,
抗靜電材料, EMI 防護(hù)材料,導(dǎo)電性纖維,導(dǎo)電性陶瓷等
導(dǎo)電膜雙電測電四探針測試儀
功能描述Description:
1. 四探針組合雙電測量方法
2. 液晶顯示,自動測量,自動量程,自動系數(shù)補(bǔ)償.
3. 集成電路系統(tǒng)、恒流輸出.
4. 選配:PC軟件進(jìn)行數(shù)據(jù)管理和處理.
5. 提供中文或英文兩種語言操作界面選擇
導(dǎo)電膜雙電測電四探針測試儀
參照標(biāo)準(zhǔn):
1.硅片電阻率測量的標(biāo)準(zhǔn)(ASTM F84).
2.GB/T 1551-2009 《硅單晶電阻率測定方法》.
3.GB/T 1551-1995《硅、鍺單晶電阻率測定直流兩探針法》.
4.GB/T 1552-1995《硅、鍺單晶電阻率測定直流四探針法》.
導(dǎo)電膜雙電測電四探針測試儀雙電組合測試方法:
利用電流探針、電壓探針的變換,進(jìn)行兩次電測量,對數(shù)據(jù)進(jìn)行雙電測分析,解決樣品幾何尺寸、邊界效應(yīng)以及探針不等距和機(jī)械游移等因素對測量結(jié)果的影響,適用于斜置式四探針對于微區(qū)的測試。
規(guī)格型號/ model | FT-341 | FT-342 | FT-343 | FT-345 | FT-346 | FT-347 |
1.方塊電阻sheet resistance | 10-5~2×105Ω/□ | 10-4~2×105Ω/□ | 10-3~2×105Ω/□ | 10-3~2×104Ω /□ | 10-2~2×105Ω/□ | 10-2~2×104Ω/□ |
2.電阻率Resistivity | 10-6~2×106Ω-cm | 10-5~2×106Ω-cm | 10-4~2×106Ω-cm | 10-4~2×105Ω-cm | 10-3~2×106Ω-cm | 10-3~2×106Ω-cm |
3.測試電流Test current | 0.1μA.μA.0μA,100µA,1mA,10mA,100mA | 1μA,10μA,100µA,1mA,10mA,100mA | 0.1μA.μA,10μA,100µA,1mA,10mA,100 mA | 1μA,10μA,100µA,1mA,10mA,100mA | 0.1μA、1μA、10μA,100µA,1mA,10mA,100mA | 1μA,10μA,100µA,1mA,10mA,100mA |
4.電流精度Current | ±0.1% accuracy | ±0.2% accuracy | ±0.2% accuracy | ±0.3% accuracy | ±0.3% accuracy | ±0.3% accuracy |
5.電阻精度Resistance | ≤0.3% accuracy | ≤0.3% accuracy | ≤0.3% accuracy | ≤0.5% accuracy | ≤0.5% accuracy | ≤0.5% accuracy |
6.顯示讀數(shù)display | 屏液晶顯示:電阻、電阻率、方阻、溫度、單位換算、溫度系數(shù)、電流、電壓、探針形狀、探針間距、厚度 、電導(dǎo)率Large screen LCD: Resistance. resistivity. sheet resistance. temperature. unit conversion.temperature coefficient. current. voltage. probe shape. probe spacing. thickness. conductivity | |||||
7.測試方式 | test mode雙電測量Double electrical measurement | |||||
8.電源Power | 輸入: AC 220V±10%.50Hz 功 耗:<30W | |||||
9.誤差errors | ≤3%(標(biāo)準(zhǔn)樣片結(jié)果) | |||||
10.選購功能choose to buy | 選購1.pc軟件; 選購2.方形探頭; 選購3.直線形探頭; 選購4.測試平臺;5.標(biāo)準(zhǔn)電阻.1.pc software; 2. square probe; 3. linear probe; 4. test platform | |||||
11.測試探頭test probe | 探針間距選購:1mm;2mm;3mm三種規(guī)格; 探針材質(zhì)選購:碳化鎢針;白鋼針;鍍金磷銅半球形針Optional probe spacing: 1mm;2mm;3mm in three sizes.Select probe material: tungsten carbide needle. white steel needle. gilded copper hemispherical needles. |