| |
Model | SNE-3200M |
| Electron system | |
| Resolution | 15nm （30kV, SE Image）
20nm （（30kV, BSE Image） |
| Magnification | 30x ~ 60,000x |
| Accelerating Voltage | 5~30kV （5 / 10 / 15 / 20 / 30 . 5 Steps） |
| Signal Detection | Secondary Electron Image（SEI）
Backscattered Electron Image（BSE） |
| Observation mode | Standard mode
Charge-up reduction mode |
| Electron Gun | Pre-centered Tungsten Filament Cartridge |
| Lens System | Two-stage Electromagnetic Condenser Lens
One-stage Electromagnetic Objective Lens |
| Stage system | |
| Stage Traverse | 3-axis System - X, Y-axis : 20mm / R-axis : 360°
· Image Shift : ±100? |
| Max. Sample Size | 50mm in Diameter x 20mm in Height |
| Iamge system | |
| Frame Memory | High Speed Mode （320×240） : 10 Frame / sec （Preview）
Low Speed Mode （640×480） : 1 Frame / sec
Photo Mode1 （1280×960） : 1 Frame / sec
Photo Mode2 （2560×1920） : 1 Frame / sec
Sampling Photo mode3 : 1 Frame / min |
| Automation Function | Auto Focus, Auto Stigmator Auto Contrast & Brightness |
| Image Format | BMP, JPG, PNG |
| Data display | Magnification, Detector Type, Accelerating Voltage, Vacuum mode, Logo（text）, Date and time, Micron marker |
| Vacuum System | |
| Vacuum mode | High & Low Vacuum system |
| Vacuum Pump | Rotary Pump + Turbo Molecular Pump [Full Automation System] |
| Control system | |
| OS | Microsoft Windows® 7 |
| CPU | In® CoreTM i5 |
| Memory / HDD | 2GB / 500GB |
| Interface connector | USB 2.0 |
| Dimensions and weight | |
| Main Unit | 390（W）x640（D）x560（H）mm, 90kg |
| Installation rooom | Room temperature : 15℃~30℃/ Humidity : 70% or less / Electric power : Single phase 100~240 AC, 1KW, 50/60Hz |
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